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当前位置:主页 > 产品中心 > 洁净室

   一、洁净室的定义

  洁净室,英文名CleanRoom,根据国人的语方习惯也称为无尘间、无尘房、无尘室、洁净间、洁净房、净化房、净化室、净化间、清洁房等。洁净室的主要功能为控制室内污染,没有洁净室,污染敏感零件不可能批量生产。在FED-STD-2里面,洁净室被定义为具备空气过滤、分配、优化、构造材料和装置的房间,其中特定的规则的操作程序以控制空气悬浮微粒浓度,从而达到适当的微粒洁净度级别。洁净程度和控制污染的持续稳定性,是检验洁净室质量的核心标准,该标准根据区域环境、净化程度等因素,分为若干等级,常用的有国际标准和国内区域行业标准。详见:我公司《空气净化工程介绍》。
 

洁净室
 

  JIEJINGSHISHIZHIJIANGYIDINGKONGJIANFANWEINEIZHIKONGQIZHONGDEWEILIZI、YOUHAIKONGQI、XIJUNDENGZHIWURANWUPAICHU,BINGJIANGSHINEIZHIWENDU、JIEJINGDU、SHINEIYALI、QILIUSUDUYUQILIUFENBU、ZAOYINZHENDONGJIZHAOMING、JINGDIANKONGZHIZAIMOUYIXUQIUFANWEINEI,ERSUOJIYUTEBIESHEJIZHIFANGJIAN。YIJISHIBULUNWAIZAIZHIKONGQITIAOJIANRUHEBIANHUA,QISHINEIJUNNENGJUYOUWEICHIYUANXIANSUOSHEDINGYAOQIUZHIJIEJINGDU、WENSHIDUJIYALIDENGXINGNENGZHITEXING。

  JIEJINGSHIXIANGDUIWUCHENCHEJIAN、JINGHUACHANGFANGLAISHUO,QITIJILIANGDAXIAOYAOXIAOHENDUO,TONGCHANGSHIZHIDANTIFANGJIANDEJINGHUAGONGCHENG,JIEJINGSHISHIKONGQIWUCHENJINGHUAGONGCHENGZHONGDEYIGEYINGYONGHENGUANGFANDEXIANGMU。

  二、洁净室的应用行业

  JINGHUAGONGCHENGSHIYIGEYINGYONGXINGYEFEICHANGGUANGFANDEJICHUXINGPEITAOCHANYE,ZAIDIANZIXINXI、BANDAOTI、GUANGDIANZI、JINGMIZHIZAO、YIYAOWEISHENG、SHENGWUGONGCHENG、HANGTIANHANGKONG、QICHEPENTUDENGZHONGDUOXINGYEJUNYOUYINGYONG,BINGGENJUXINGYEDEJINGMIYUWUCHENYAOQIU,DENGJICHABIEYEJIAODA。

  洁净室容量体积相对较小,故洁净室基本应用在上述净化应用行业中储藏、检测、实验、化验等工序之中。根据国人的语方表达习惯也将洁净室称为无尘间、无尘房、无尘室、洁净间、洁净房、净化房、净化室、净化间、清洁房等等。
 


 

  三、洁净室的组成部分

  JIEJINGSHIDEGOUCHENGSHIYOUXIALIEGEXIANGXITONGSUOZUCHENG(ZAISUOZUCHENGDEXITONGFENZIZHONGSHIQUEYIBUKEDE),FOUZEJIANGWUFAGOUCHENGYIWANZHENGQIEPINZHILIANGHAODEJIEJINGSHI。

  1、WEIFANGGOUJIAN,JIZUCHENGJIEJINGSHIDEMIFENGXINGKONGJIAN。BAOKUO:

  1)TIANHUABANXITONG:BAOKUODIAOGAN(Ceilingrod)、GANGLIANG(I-BeamHUOU-Beam)、TIANHUABANGEZILIANG(CeilinggridHUOCeilingframe)。

  2)GEQIANGBAN(Partitionalwall):BAOKUOCHUANGHU、MEN。

  3)DIBAN:BAOKUOGAOJIADIBAN、FANGJINGDIANBAN、HUANYANGZILIUPING、PVCJINGHUADIBANDENG。

  4)SHINEISHINEITONGDAOFUJIAN:BAOKUOFENGLINSHI、GENGYISHI、CHUANDICHUANGDENG

  2、KONGQIDIAOJIEJINGHUAXITONG,BAOKUO:

  1)JINGHUAJIZU、

  2)GUOLVQIXITONG

  3)GUANDAOXITONG:FENGGUAN、SHUIGUAN、TONGGUANDENG

  3、ZHINENGKONGZHIBUFEN,BAOKUO:

  1)ZHAOMINGYUZHAOMINGKONGZHI

  2)ZHINENGYUYUANCHENGKONGZHIXITONG

  四、洁净室分类

  JIEJINGSHIZHUYAOFENWEIGONGYEJIEJINGSHI(WUCHEN)HESHENGWUJIEJINGSHI(WUCHEN,WUJUN)

  GONGYEJIEJINGSHIHESHENGWUJIEJINGSHIQISHIDOUSHISHUYUJIEJINGSHI,BENZHISHANGDEQUBIEZHUYAOYIGESHIZHENDUIWUCHEN,YIGEZHENDUIWUJUN,LIANGZHEZHUYAOMUDEYOUSUOQUBIE,YINCIZAISHEJIHESHIGONGYAOYOUSUOCEZHONG。

  GONGYEJIEJINGSHISHIYONGYUJINGXIJIXIEGONGYE、DIANZIGONGYE(BANDAOTI、JICHENGDIANLUDENG)YUHANGGONGYE、GAOCHUNDUHUAXUEGONGYE、YUANZINENGGONGYE、GUANGCICHANPINGONGYE(GUANGPAN、JIAOPIAN、CIDAIXIAOFEI)LCD(YEJINGBOLI)、DIANNAOYINGPAN、DIANNAOCITOUXIAOFEIDENGDUOXINGYE。

  生物洁净室适用于制药工业、医院(手术室、无菌病房)、食品、化装品、饮料产品消费、动物实验室、理化检验室、血站等。
 


 

  五、洁净室中的温湿度控制

  JIEJINGSHIDEWENSHIDUZHUYAOSHIGENJUGONGYIYAOQIULAIQUEDING,DANZAIMANZUGONGYIYAOQIUDETIAOJIANXIA,YINGKAOLVDAORENDESHUSHIDUGAN。SUIZHEKONGQIJIEJINGDUYAOQIUDETIGAO,CHUXIANLEGONGYIDUIWENSHIDUDEYAOQIUYEYUELAIYUEYANDEQUSHI。JUTIGONGYIDUIWENDUDEYAOQIUYIHOUHAIYAOLIEJU,DANZUOWEIZONGDEYUANZEKAN,YOUYUJIAGONGJINGDUYUELAIYUEJINGXI,SUOYIDUIWENDUBODONGFANWEIDEYAOQIUYUELAIYUEXIAO。

  例如在大规模集成电路生产的光刻曝光工艺中,作为掩膜板材料的玻璃与硅片的热膨胀系数的差要求越来越小。直径100um的硅片,温度上升1度,就引起了0.24um线性膨胀,所以必须有±0.1度的恒温,同时要求湿度值一般较低,因为人出汗以后,对产品将有污染,特别是怕钠的半导体车间,这种车间不宜超过25度。湿度过高产生的问题福建快三。相对湿度超过55%时,冷却水管壁上会结露,如果发生在精密装置或电路中,就会引起各种事故。相对湿度在50%时易生锈。此外,湿度太高时将通过空气中的水分子把硅片表面粘着的灰尘化学吸附在表面耐难以清除。相对湿度越高,粘附的难去掉,但当相对湿度低于30%时,又由于静电力的作用使粒子也容易吸附于表面,同时大量半导体器件容易发生击穿。对于硅片生产最佳温度范围为35—45%。
 


 

  六、洁净室中的气流速度规定

  ZHEILIYAOTAOLUNDEQILIUSUDUSHIZHIJIEJINGSHINEIDEQILIUSUDU,ZAIQITAJIEJINGKONGJIANZHONGDEQILIUSUDUZAITAOLUNJUTISHEBEISHIZAISHUOMING。

  DUIYULUANLIUJIEJINGSHIYOUYUZHUZHUYAOKAOKONGQIDEXISHIZUOYONGLAIJIANQINGSHINEIWURANDECHENGDU,SUOYIZHUYAOYONGHUANQICISHUZHEIYIGAINIAN,ERBUZHIJIEYONGSUDUDEGAINIAN,BUGUODUISHINEIQILIUSUDUYEYOURUXIAYAOQIU;

  (1)SONGFENGKOUCHUKOUQILIUSUDUBUYITAIDA,HEDANCHUNKONGDIAOFANGJIANXIANGBI,YAOQIUSUDUSHUAIJIANGENGKUAI,KUOSANJIAODUGENGDA。

  (2)CHUIGUOSHUIPINGMIANDEQILIUSUDU(LIRUCESONGSHIHUILIUSUDU)BUYITAIDA,YIMIANCHUIQIBIAOMIANWEILIZHONGFANQILIU,ERZAOCHENGZAIWURAN,ZHEIYISUDUYIBANBUYIDAGAN0.2m/s。

  DUIYUPINGXINGLIUJIEJINGSHI《XIGUANSHANGCHENGCENGLIUJIEJINGSHI),YOUYUZHUYAOKAOQILIUDE“HUOSAIDAJIYAZUOYONGPAICHUXINGRAN,SUOYIJIEMIANSHANGDESUDUJIUSHIFEICHANGZHONGYAODEZHIBIAO。GUOQUDOUCANKAOMEIGUO20gBBIAOZHUN,CAIYONG0.45m/s.DANRENMENYEDOULEJIEDAOZHEIYANGDASUDUSUOXUYAODETONGFENGLIANGSHIJIDADE,WEILEJIENENG,YEDOUZAITANQIUJIANGDISUYIFENGSUDEKEXINGXING。

  ZAIWOGUO,《KONGQIJIEJINGJISHUCUOSHI》HE(JIEJINGCHANGFANGSHEJIGUIFAN)DOUSHIZHEIYANGGUIDINGDE

  CHUIZHIPINGXINGLIU(CENGLIU)JIEJINGSHI≥0.25m/s

  SHUIPINGPINGXINGLIU(CENGLIU)JIEJINGSHI≥0.35m/s