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浅谈集成电路无尘车间设计探讨

2019-05-15 17:11:27   作者:kewatt  出处:科瓦特

  ZHONGGUODIANZIGONGCHENGSHEJIYUAN  QINXUELI

  摘要

  随着IC生产工艺技术的不断发展,对于无尘车间生产环境及其它配套系统要求也相应更为严格,本文81"、12",IC生产的无尘车间设计中有关无尘车间形式和送风方式、空气处理及温湿度保证措施,悬浮分子污染物(AMC)的控制,以及无尘车间排烟等方面的设计方案,进行了多方案的综合分析和评价。

  引言

  JICHENGDIANLU(IC)SHIJIDUOZHONGGAOXINJISHUYUYITIDEGAOKEJICHANPIN,TAJIHUCUNZAIYUSUOYOUGONGYEBUMEN,DUIGUOMINJINGJIDEFAZHANQIZHE“BEIZENGQI”DEZUOYONG,YINCIBEI GUOJIAZUOWEIZHANLVEXINGCHANYE。TONGSHIICCHANYEYESHIDANGJINSHIJIESHANGFAZHANZUIWEIXUNSU、JINGZHENGZUIWEIJILIEDECHANYE。YOUYUXIAYOUCHANPINDEXUYAOYIJISHENGCHANCHENGBENDEKAOLV,ICBUDUANCHAOZHETEZHENGCHICUNSUOXIAO,GUIPIANZHIJINGZENGDADEFANGXIANGFAZHAN。MUQIAN SHANGYI8”、0.25-0.18WEIMIWEIDAIBIAODEGONGYIYIJINRUDASHENGCHAN,YI12”、0.15-0.13WEIMIWEIDAIBIAODEGONGYIYEKAISHIJINRUDASHENGCHAN,YANJIUGONGZUOYIJINRUNAMIJIEDUAN,70NAMI、40NAMIDEQIJIANYIZAISHIYANSHIZHONGZHIBEICHENGGONG。

  SUIZHEGONGYINIUCHANJISHUDEBUDUANFAZHAN,ICSHENGCHANDUIYUHUANJINGJIQITAPEITAOXITONGDEYAOQIUYEXIANGYINGYUELAIYUEYANGE,SHUODAOHUANJINGSHOUDANGQICHONGDESHIWUCHENCHEJIAN,8”、12”ICSHENGCHANWULUNDUIJIEJINGDU、WENSHIDUHAISHIKONGQIZHONGFENZIJIWURANWU(AMC)、FANGWEIZHEN、FANGJINGDIANDENGDOUYOUJIYANGEDEYAOQIU,YOUXIEKEKEDEYAOQIUSHENZHISHIMOUXIECHUANTONGDEZUOFASHOUDAOTIAOZHAN。

  1、无尘车间形式

  1.1WUCHENCHEJIANCONGPINGMIANBUZHIHUAFENYIBANYOUSANZHONGXINGSHI:JIKAIFANGSHI(ballroomtype)、GANGWANSHI(baycliasetype)、DAOXINGBUZHI(islandtype),RUTU1、2、3。

开放式洁净室
港湾式洁净室
岛行布置

  YISHANGSANZHONGXINGSHIWUCHENCHEJIANGEYOUQIYOUQUEDIAN,ICQIANGONGXUSHENGCHANCHANGTONGCHANGCAIYONGGANGWANSHIHEKAIFANGSHIWUCHENCHEJIAN,GANGWANSHIWUCHENCHEJIANZAI5”、6”ICSHENGCHANCHANGYONGDEJIAODUO,QIGONGYISHEBEIWEICHUANQIANGSHI:ER8”、12”ICSHENGCHANCHANGZEPUBIANCAIYONGKAIFANGSHIWUCHENCHEJIANJIAWEIHUANJING(mini-environment)DEFANGSHI。KAIFANGSHIWUCHENCHEJIANXIANZHUDEYOUDIANSHOUXIANSHIDUIGONGYIBUZHIDAILAIZUIDADELINGHUOXING,ZHEIYOUWEIZHONGYAO,YINWEIDANGJIN[CSHENGCHANJISHUFAZHANJIWEIXUNSU,BULUNCHANPINBENSHENYAOQIUHAISHIGONGYISHENGCHANGUOCHENGHESHENGCHANSHEBEIDOUCHUZAIBUDUANBIANHUAZHONG,ERICSHENGCHANGONGCHANGDEJIANSHEZHOUQICONGKAISHISHEJIDAOANZHUANGGONGYISHEBEITONGCHANGXUYAOYINIANBANZUOYOUDESHIJIAN,ZAIZHEIDUANSHIJIANNEIDINGYISHENGCHANJISHUYIJIGONGYIMEIBEIXUYAOBUDUANDEDIAOZHENGHEGENGXIN,ZHIYOU

  ZHEIYANGCAIKEYIBAOZHENGTOUCHANSHIQISHENGCHANJISHUXIAOHUICHUYULUOHOUDEJIONGDI,JISHITOUCHANYIHOU,YEHUIYINCHANPIN、SHICHANGJISHENGCHANJISHUDENGYINSUDEBIANHUAERXUYAODUISHENGCHANXIANJINXINGGAIZAOYIDIAOZHENGCHANPINHECHANNENG。QICI8”、12”ICSHENGCHANDUIHUANJINGYOUQISHIJIEJINGDUSHUAQIUJIWEIYANGE,TONGCHANGGUIPIANBAOLUQU(JIAGONGGUOCHENG)YAOQIU1.5JI(209E,O.lμm,1JI).CAIYONGKAIFANGSHIWUCHENCHEJIANJIAWEIHUANJINGFANGSHIZAIPEITAOZIDONGWULIAOCHULIXITONGautomatedmaterialhandlingsystem.AMHS),YIFANGMIANKOUKEYISHICAOZUORENYUANHEQITAWURANYUANYUGUIPIANWANQUANGELI,LINGYIFANGMIANSHENGCHANZIDONGHUACHENGDUDETIGAODUITIGAOGUIPIANCHENGPINLVJIWEIYOULI。KAIFANGSHIWUCHENCHEJIANJIAWEIHUANJINGFANGSHI,GONGYISHENGCHANZHIYAOQIUWEIHUANJINGNEIYOUHENYANGEDEJIEJINGDU,ERKAIFANGSHIWUCHENCHEJIANZHIXUBAOZHENG5-6JI,ZHEIYANGYANGEYAOQIUDEJIEJINGDUQUYUDADAJIANSHAO,BAOZHENGJIEJINGDUSUOXUDEXUNHUANKONGQILIANGYEXIANGYINGJIANSHAO,NENGHAODADAJIANGDI,TONGCHANGQINGKUANGXIAKAIFANGSHIWUCHENCHEJIANJIAWEIHUANJINGFANGSHIQIWEICHIJIEJINGDUSUOXUDENENGHAODAYUEJINWEIGANGWANSHIWUCHENCHEJIANDE1/3[]。SHIJIGONGCHENGZHONGWEIHUANJINGSHIYOUSHEBEIZIDAIDEHEKAIFANGSHIWUCHENCHEJIANWANQUANTUOKAI,ZAIJIASHANGKAIFANGSHIWUCHENCHEJIANBENSHENJIEGOUJIANDAN,DONGLISHEBEIJIANSHAO,ZHEIYANGWULUNCONGSHEJIDAOJIANZAODOUBIANDEJIANDANKUAIJIE,KEYISUODUANJIANZAOSHIJIAN。

  CAIYONGKAIFANGSHIWUCHENCHEJIANJIAWEIHUANJINGFANGSHI,QUEBAOGUIPIANJIAGONGGUOCHENGSUOXUDEJIEJINGDUDEGUANJIANQUYUSHIWEIHUANJING,WEIHUANJINGTONGCHANGRUTU4、TU5SUOSHI。

净化系统提供微环境

微环境

  TU4SUOSHIDEWEIHUANJINGDESONGFENGSHIYOUWUCHENCHEJIANSONGFENGXITONGTIGONG,QIQUEDIANSHIBULINGHUO,YIDONGHUOZENGJIAGONGYISHEBEIBUFANGBIAN。MUQIAN8”、12”ICSHENGCHANXIANSUOYONGDEWEIHUANJINGJIBENSHANGSHITU5DEXINGSHI(GUANGKEJICHUWAI),WEIHUANJINGQUANBUYOUGONGYISHEBEIZIDAI,YUGONGYISHEBEIJINMIJIEHEZAIYIQI,BINGQIEYUZHUANGZAITAI、QIANKAIKOUCHUANDIHE(frontopeningunifiedpods.FOUP)、DIAOGUACHUANSHUXITONG(ovcerheadhoisttransport,OHT)YOUJIJIEHE。WEIHUANJINGXITONGDEFENGJIZHIJIEXISHINEIDEKONGQI,JINGULPGUOLVQICHULIHOUCHUIZHIXIACHUI,YIBAOZHENGGUIPIANBAOLUQUYANGEDEJIEJINGDUYAOQIU。WEIHUANJINGNEIDESONGFENGDUANMIANFENGSUTONGCHANGBAOCHIZAI0.2-0.45m/s,BINGBAOZHENGGUOLVQICHUKOUDUANMIANSHANGRENYIYIDIANDEFENGSUBUCHAOGUOPINGJUNFENGSUDE±20%,GUOGAODEFENGSUHUISHIWEIHUANJINGDEWENDUPIANGAO。WEIHUANJINGDEFENGJIYINGWEIBIANPINFENGJIYISHIYINGGUOLVQIDEZULIBIANHUA,SUOYONGGUOLVQIDEXIAOLV≥99.99995%(MPPS)。WEIBIMIANZHOUWEI“ZANG”KONGQISHENRUWEIHUANJING,WEIHUANJINGXIANGDUIYUZHOUWEIHUANJING(KAIFANGSHIWUCHENCHEJIAN)YINGBAOCHIBUDIYU1.25PaDEZHENGYA,ZHEIKEYITONGGUODIAOJIEDIBUDEHUIFENGFAMENSHIXIAN。8”、12”ICSHENGCHANDUIFANGWEIZHENYAOQIUJIGAO,ERWEIHUANJINGSUOYONGDEFENGJIJINKAOSHENGCHANSHEBEI,SUOYIFENGJIYUSHEBEIWENYINGSHEYOUXIAOJIANZHENCUOSHI,BINGQIEFENGJIBENSHENCHANSHENGDEZHENDONGZAI3-100HzPINDUANNEIRENYIYIGEPINLVDIANDEZHENDONGWEIYIFUZHI≤1.25μm。

  1.2、WUCHENCHEJIANCONGSONGFENGXITONGFANGSHIHUAFENYIBANYEYOUSANZHONGXINGSHI:JIJIZHONGSONGFENGXITONG(centralsystem)、SUIDAOXITONG(tunnelsysterm、FFUXITONG(fanfilterunitsystem),RUTU6、7、8。

集中送风系统

 

隧道系统

 

ffu系统

ZHEISANZHONGSONGFENGXITONGGEYOUTEDIAN,CONGBUTONGDEJIAODUBIJIAOHUIDECHUBUTONGDEJIELUN,SUOYIBUNENGJIANDANDISHUOSHUYOUSHULIE,SONGFENGXITONGFANGSHIDECAIYONGZHUYAOQUJUEYUYEZHU、SHEJIRENYUANDEGUANZHUDIANCEZHONGYUNAXIEFANGMIAN。BUGUOFFUXITONGJINJINIANLAIDEDAOYUELAIYUEGUANGFANDESHIYONG,YOUQISHIZAIYATAIDIQU。GUONEIYEBULIWAI,YIJIANDEHEZAIJIANDE8”、12”ICSHENGCHANCHANGFANGJIHUDOUCAIYONGFFUXITONG,HENDUO5”、6”ICSHENGCHANCHANGFANGJINJINIANYECAIYONGFFUXITONG。JIUQIYUANYIN,CHULEXIGUAN、JINGYANDENGFEIJISHUXINGYINSUZHIWAI,BUWAIHUYOUYIXIAJIGEYUANYIN:

  a)LINGHUOXING:ZAISANZHONGXITONGZHONG,FFUXITONGDELINGHUOXINGSHI DE,ZHEIDIANTEBIESHIYINGDANGJINICSHENGCHANJISHUFEISUFAZHANDEYAOQIU,YOUYUSUIZHECHANPINSHENGCHANGONGYIDEFAZHANJIEJINGDUDENGJIXUQIUYEHUIBUDUANYANGE。SUIDAOXITONGJIHUTANBUSHANGLINGHUOXING,QIESUIDAOXITONGSHIYICAOZUOQUZUOWEISONGFENG、SHEBEIQUZUOWEIHUIFENGDEKONGQIXUNHUANXITONG,DAN8”、12”ICCHANGFANGWUCHENCHEJIANRIQIANJIBENSHANGDOUCAIYONGBallroomFANGSHI,,f:FENCAOZUOQUHESHEBEIQU,YINCISUIDAOXITONGYEJIUBUSHIYONGJ;JIZHONGSONGFENGXITONGYOUYIDINGDELINGHUOXING,DANJIEJINGXITONGGAIZAOSHIBIXUTINGJI、TINGCHAN。RUGUOYAOTIGAOJUBUQUYUDEJIEJINGDU,CHULEWUCHENCHEJIANDINGBUYAOZENGJIAHEPA/ULPAGUOLVQIWAI,HAIXUZENGSHEXUNHUANJIZU,CONGERSHIGAIZAONANDUDA,ERQIEDUISHENGCHANYOUJIAODAYINGXIANG;CAIYONGFFUXITONG,JUBUZENGJIAFFUTAISHUHUOYIDONGFFUWEIZHIJUNHENRONGYISHIXIAN,ERQIEKEYIZAIBUTINGCHANDEQINGKUANGXIAJINXING,DUISHENGCHANJIHUMEIYOUYINGXIANG。

  b)DIAOKONGXING:HEJIZHONGSHISONGFENGXITONGXIANGBI,FFUXITONGGEQUKONGQIJIAOCHADEQINGKUANGXIANGDUIYAOSHAO,KEYISHIXIANJIAOGAOJINGDUDEWENSHIDUKONGZHI。SUIZHEDIANJIYUWANGLUOKONGZHIJISHUDEFAZHAN,FFUHENRONGYISHIXIANDANTAIKONGZHI,MEITAIFFUCHUFENGSUDUZAIYIDINGFANWEINEIJIHUKEYIRENYIDIAOJIE,ZHEIYANGJIUHENRONGYIJIEJUEDAKUADUWUCHENCHEJIANYUANJINDUANQILIUBUJUNYUNDEWENTI。LINGWAIFFUHAIKEYIGENJUSHIJISHIYONGXUYAOTINGKAIHUOSHAOKAIQIYIBUFEN。

  c)KEKAOXING:CAIYONGJIZHONGSONGFENGXITONGZHIYAOYITAISONGFENGJIZUCHUXIANGUZHANG,ZHENGGEXITONGDEJIEJINGDUJIUDEBUDAOBAOZHENG,CHUFEIYOUBEIYONGJIZUNENGLIJITOURUYUNXING;DUIYUSUIDAOXITONGYIDANMOUYITAIXUNHUANJIZUTINGZHIYUNXING,GAIXUNHUANJIZUSUOFUDANDEJIEJINGQUYUDEJIEJINGDU、WENSHIDUJIUWUFABAOZHENG,SHENGCHANYEZHIHAOTINGZHI;ERFFUXITONGZHEIFANGMIANDEFENGXIANXIANGDUIYAOXIAODEDUO,JISHIYOUYITAIFFUCHUXIANGUZHANG,QIYINGXIANGMIANHENXIAOLINGWAISUIZHEWANGLUOJIANKONGJISHUDEFAZHAN,FFUXITONGYINSHULIANGDUOERZAOCHENGWEIHUBUBIANDEQINGKUANGYEYIDEDAOGAISHAN。

  d)QIMIXINGYUKONGJIANLIYONG:FFUXITONGYOUYUFENGJIZHIJIESHEZAIGONGZUOQUSHANGFANG,YINCIGONGZUOQUXIANGDUIYUHUIFENGDAOJISHANGJINGYAXIANGWEIZHENGYA,GONGZUOQUYIWAIWURANWUJISHAOYINXIELOUJINRUSHANGZUOQU:XIANGFANDE,JIZHONGSONGFENGXITONGHESUIDAOXITONGGONGZUOQUXIANGDUIYUSHANGJINGYAXIANGWEIJIAODADEFUYA,YINCIXIELOUDEFENGXIANXINGBIFFUXITONGYAOGAODEDUO。LINGWAICAIYONGJIZHONGSONGFENGXITONGJISUIDAOXITONG,SHANGJINGYAXIANGYUZHOUWEIHUANJINGDEYACHAHENDA,JIYIFASHENGKONGQIXIELOU,YINCIDUISHANGJINGYAXIANGDEQIMIXINGYAOQIUHENGAO,JIBENSHANGBUYUNXUGUANXIANJINREN。ERFFUXITONGDESHANGJINGYAXIANGXIANGDUIYUZHOUWEIHUANJINGZHISHIWEIZHENGYA,SHANGJINGYAXIANGNEIKEYIBUZHIHUOCHUANYUEZHURUPAIFENGHEPAIYANDENGGUANDAO,SHIKONGJIANDEDAOHELILIYONG。

  e)NENGHAOWENTI:YIXIETONGJIZILIAOBIAOMING,ZAIICCHANGFANGZHONG,WEICHISHENGCHANHUANJINGJIEJINGDUDEKONGQIXUNHUANGUOLVXITONGSHICHUGONGYISHEBEIWAIDEHAONENGZUIDADEXITONG,SUOYICAIYONGHEZHONGSONGFENGXITONGQINENGHAOYESHIBIXUKAOLVDEYINSU。DAXINGZHOULIUFENGJIDEQUANYAXIAOLVLIXIANGSHANGKEDA80%,DIANJIXIAOLVYIBANKEDA90%,ZEYONGDIANXIAOLVSHILIANGZHEDECHENGJI72%,RUGUOKAOLVXIAOYINQIDUIFENGYAZAOCHENGDESUNSHI,SHIFENGJIQUANYAXIAOLVJIANGZHI70%,ZEYONGDIANXIAOLVYESUIZHIJIANGDAO63%(JIASHEDIANJIXIAOLVBUBIAN);8”、12”ICCHANGFANGWUCHENCHEJIANZHONGDEFFUTONGCHANGCAIYONGZHILIUWUSHUADIANJI,XIAOLVYEKEDADAO90%[2],TONGCHANGYONGDIANXIAOLVZAI50%ZUOYOU。SUOYIZAI DEYUNXINGZHUANGTAIXIA,DAXINGZHOULIUFENGJIDEDANJIYONGDIANXIAOLVGAOYUXIAOXINGFFUYINGGAISHIMEIYOUSHENMEYIWENDE。DANSHIJIGONGCHENGQINGKUANGYOUZENYANGNI?YOUYUZHILIUWUSHUADIANJIKEYIZAIXIANGDANGDADEYUNXINGFANWEILIBAOCHIGAOXIAOLVCHULI,ERDAXINGZHOULIUFENGJIZAIBIANPINYUNZHUANHOUDIANJIXIAOLVHUIJIJUXIAJIANG,DANJIEJINGXITONGZHONGHEPA/ULPADEZULISHIBUDUANBIANHUADE,QIECHU、ZHONGZULIXIANGCHAJIAODA,SUOYIZAIXIANGDANGZHANGDESHIJIANNEIFENGJISHIZAIFEISHEJIZHUANGTAIYUNXING,CONGZHEIFANGMIANKAOLVFFUXITONGYOUHUIJUYOUYIDINGYOUSHI。SUOYIDUIJIZHONGSONGFENGXITONGHEFFUXITONGDENENGYUANXIAOLVBIJIAO,HENNANZUOCHUMINGQUEDEJIELUN,YINGSHIJUTIGONGCHENGXIANGMUDECHANPINSHENGCHANQINGKUANG、JINGHUAKONGDIAOXITONGJIQISHEBEIPEIZHIQINGKUANGDENGQUEDING。

  2、空气处理及温湿度保证

  8”、12”ICSHENGCHANYOUYUQIGONGYIJIAGONGXIANKUANJIXIAO,SUOYIDUIWENSHIDUDEJINGDUYAOQIUHENGAO,TONGCHANGWENDUJINGDUWEI±0.3~±0.5℃,XIANGDUISHIDUJINGDUWEI±2%~±3%。GAILEICHANGFANGWUCHENCHEJIANYIBANCAIYONGXINFENGJIZHONGCHULIJIAFFUXITONG,ZAIXIAJIACENGHUOSHANGJINGYAXIANGNEISHEGANBIAOLENGQI。WUCHENCHEJIANNEIDEXIANG

  DUISHIDUYOUXINFENGJIZUBAOZHENG,WENDUYOUGANBIAOLENGQIBAOZHENG。

  2.1、XINFENGCHULIJIXIANGDUISHIDUBAOZHENG

  XINFENGCHULIJIZUDEGONGNENGDUANRUTU9SUOSHI,XINFENGCHULIJIZUZHONGSHEZHICHU、ZHONG、GAOXIAOSANJIGUOLV,YIQUCHUSHIWAIKONGQIZHONGDEHUICHENLIZI,SHEGAOXIAOGUOLVQIHENYOUBIYAOKEYIYANZHANGWUCHENCHEJIANDINGBUFFUNEIULPAGUOLVQIDESHIYONGSHOUMING;

新风处理机组

  设置化学过滤器主要是去除室外空气中对IC生产有影响的杂质气体,根据工厂所在地的室外空气品质设置相应的化学过滤器,化学过滤器后通常需设中效过滤器以去除化学过滤器本身的产尘;通过设在新风处理机组内的两级表冷、两级加热以及洁净蒸汽加湿器保证新风处理机组出口的干球温度及露点温度全年基本恒定,而机组出口的露点温度还应根据其对应送风区域内的相对湿度进行连续的重新整定,以保证室内的相对湿度。这里不以房间内的相对湿度直接控制加湿器或表冷器,而以房间内的相对湿度连续的重新整定机组出口的露点温度,再由该露点温度控制加湿器或表冷器是为了得到更及时的湿度控制:由于外网蒸汽中含有对IC生产有影响的杂质,新风处理机组的加湿应采用洁净蒸汽。洁净蒸汽加湿器通常设在表冷器前,这样可以使新风处理机组确提高相对湿度控制精度的潜能。有些工程中是以喷淋初级纯水(一级RO后)代替洁净蒸汽加湿器,这是一举两得的好办法,因为喷淋纯水既可以达到加湿的目的,又可以去除空气中对IC牛产有影响的杂质气体。新风处理机组还应保证无尘车间内的正压,所以新风机组内的风机应配置变频装置,以无尘车间内的正压值控制风机转速。新风集中处理有诸多优点,但在寒冷地区使用时则特别要注意盘管的防冻问题。另外因8”、12”IC生产对环境的可靠性有极高的要求,新风处理机组必须设一台备用机组。
 

  2.2、XUNHUANFENGCHULIJIWENDUBAOZHENG

  8”、12”ICCHANGFANGWUCHENCHEJIANTONGCHANGCAIYONGFFUXITONG(RUTU8),SHINEIKONGQIJINGGANBIAOLENGQILENGQUECHULIHOUYUXINFENGHUNHE,ZAIYOUSHEZAIFANGWENDINGBUDEFFUJIAYA、GUOLVHOUSONGRUFANGJIAN。HAIYOUYIZHONGQINGKUANGSHIGANBIAOLENGQISHEZAISHANGJIACENG,KONGQICHULIGUOCHENGLVEYOUBUTONG,QIGUOCHENGWEI:XINFENGHEHUIFENGHUNHE,ZAIJINGQIANBIAOLENGQILENGQUE,ZUIHOUYOUFFUJIAYA、GUOLVHOUSONGRENWUCHENCHEJIAN。GANBIAOLENGQIZHUYAOSHIXIAOCHUWUCHENCHEJIANNEIDEXIANREFUHE,GENJUWUCHENCHEJIANNEIDEWENDUKONGZHIDUIYINGQUYUDEGANBIAOLENGQIYIBAOZHENGFANGWENDEWENDU。CAIYONGGAIXITONGYINGZHUYIYIXIAJIDIAN:

  a)WEIDEDAOJINGQUEDEWENSHIDUKONGZHI,YINGJINLIANGJIANSHAOBallroomNEIGEQUYUZHIWENDEQILIUJIAOCHA,SUOYIGEQUYUDEGANBIAOLENGQIJIEGOUXINGSHI、KONGQICEZULIYINGJINLIANGYIZHI。

  b)KAOLVSHINEISHIDUJINGDUJIBIAOLENGQIKONGQICEZULIDENGYINSU,YINGQUEBAOGANBIAOLENGQIZAIGANGONGKUANGXIAGONGZUO,GANBIAOLENGQISUOYONGDELENGDONGSHUIWENDUYINGGENJUSHINEISHIFUHE、SHINEIKONGQIDELUDIANWENDUDENGYINSUQUEDING,ICCHANGFANGGONGYISHENGCHANSHEBEIFASHILIANGHENSHAO,KAOLVGANBIAOLENGQISUOYONGLENGDONGSHUIBENSHENDEWENDUKONGZHIJINGDUYIJIQITADEANQUANYULIANG,SHIJIGONGCHENGZHONGYIBANLENGDONGSHUIGONGSHUIWENDUBISHINEIKONGQILUDIANWENDUGAO2~3℃,WENCHATONGCHANGQU3~5℃,GENJUSHINEIWENDUKONGZHIJINGDUQUEDING。GANBIAOLENGQISUOYONGDELENGDONGSHUITONGCHANGYIHUNSHUIFANGSHIHUOHUANREFANGSHIDEDAO。

  c)GANBIAOLENGQIDUANMIANFENGSUBUYITAIGAO,YINWEIGUOGAODEFENGSUHUISHIGANBIAOLENGQIKONGQICEZULIPIANDA,ERYOUYUFANGJIANZAOSHENGYAOQIUDEXIANZHIFFUSUONENGTIGONGDEJIWAIYUYAYOUXIAN,YIBANWEI90Pa,KAOLVQITAFENGLUZULI,GANBIAOLENGQIDEKONGQICEZULITONGCHANGKONGZHIZAI40PaZUOYOU。

  3、空气中分子级污染物(AMC)控制

  SUIZHElCSHENGCHANDEFEISUFAZHAN,QIJIAGONGDETEZHENGCHICUNYUELAIYUEWEIXIHUA,QUCHUKONGQIZHONGDEAMC(airbomemolecularcontamination)WENTIYUELAIYUESHOUDAORENMENGUANZHU, BANDAOTIZHIZAOJISHUXIEHUI(SEMATECH)JIQITAJIGOU、ZUZHIDUIICSHENGCHANZHONGAMCDEWEIHAIHEYUNXUNONGDUFENBIEJINXINGLEFENXIYUCE,BIAOlSHISEMATECHSUOYUCEDE BANDAOTIFAZHANJINCHENGJIXIANGYINGDEAMCDEYAOQIU。YIXIEYANJIUJIEGUOBIAOMING,KONGQIZHONGDEJINSHULIZI(Na、K、Fe、Cu、ZnDENG)HUIPOHUAIJUEYUANCENG,SHIp-nJIELOUDIAN;ERDANYANGHUAWU、ERYANGHUALIU、AN、YOUJIWU、CHOUYANG、PENG、LINDENGDOUHUIYINQIDIANLUQUEXIAN。AMCYIZHIJIEYINGXIANGDAOCHANPINDECHENGPINLVHEKEKAOXING,SUOYIYINGJIAYIKONGZHI。

ic控制要求

  3.1AMCDELAIYUAN

  AMCLAIYUANYUWUCHENCHEJIANNEIJISHIWAIKONGQI。WUCHENCHEJIANNEIDEAMCZHUYAOLAIYUANYUYIXIAJIGEFANGMIAN:GONGYINIUCHANSHIYONGDEGEZHONGHUAXUEPIN,GONGYISHEBEIHEYUANCAILIAODEQITISHIFANG,SHINEICAOZUORENYUANYIJIGEZHONGJIANZHUCAILIAODENG。SHIWAIKONGQIZHONGDEAMCDUOSHAOYUICCHANGFANGSUOZAIDIDEKONGQIZHILIANGYOUGUAN,QIEDIFANGCHAYIXINGJIAODA,TONGCHANGYUESHIGONGCHANGJIZHONGDEGONGYEQULAIZISHIWAIDEAMCJIUYUEYANZHONG。

  3.2AMCDEKONGZHI

  JIANSHAOWUCHENCHEJIANNEIDEAMCYINGCONGYIXIASIGEFANGMIANJINXINGKONGZHI:

  a)KONGZHISHINEICHANSHENG:GONGYISHENGCHANXIANBENSHENSHIAMCZUIDADECHANSHENGYUAN,YINGONGYISHENGCHANZHONGYAOSHIYONGGEZHONGHUAXUEPIN,ZHEIXIEHUAXUEPINHUODUOHUOSHAODEYAOSANFADAOSHINEIKONGQIZHONGXINGCHENGAMC,SUOYISHOUXIANYINGCONGSHENGCHANGONGYISHANGKAOLVJINLIANGJIANSHAOHUAXUEPINDESHIYONG,LINGWAIYINGKONGZHIGONGYISHEBEIDEZHIZUOCAILIAO、TULIAODESHIFANGQITI。WUCHENCHEJIANDEGEZHONGJIANZHUCAILIAOYESHIAMCDEYIDALAIYUAN,JIANZHUCAILIAOYINQIDEAMCSHEJIMIANJIAOGUANG,MUQIANTONGCHANGCAIQUYIXIACUOSHI:JINLIANGCAIYONGAMCSHIFANGDIDEJIANZHUZHUANGXIUCAILIAO、TULIAOJIMIFENGCAILIAO,MUQIANCHANGYONGDEJIANCAIZHONGJUSIFUYIXI、BOLI、BUXIUGANG、LVHEJIN、BIAOMIANJINGKAOQICHULIDEJINSHUCAILIAO、GAODANXINGJUANZHITULIAO、HUANYANGCIQIDENGSHIKEYIJIESHOUDE,ERHUANYANGSHUZHITULIAO、GUI

  MIFENGJIAO、DAN/SHUANGMIANMIFENGJIAODAI、ZURANJIYIBUSHIYONGLE;GAIJINJIANZHUCAILIAOJIAGONGGONGYI,TIGAOJIAGONGJINGDU,GONGCHENGZHONGJINLIANGBUYONGMIFENGJIAO;JIEJINGXITONGZHONGDEHEPA/ULPAGUOLVQIYINGCAIYONGJUSIFUYIXI(PTFE)HUODIPENGDIYOUJIWUDEBOLIXIANWEIZHIZUO,LINGWAIMUQIANCHANGYONGDEDOPCESHIFANGFAYIJINAYANCESHIYESHIBUNENGJIESHOUDE,SEMATECHTUIJIANCAIYONGYIQULIZISHUIWUXIEDAIDEGUTAIJUBENYIXI(polystyrenelatex,PSL)XIAOQIUZUOWEICESHILIZI;XITONGZHONGDEXIYINCAILIAOJINLIANGBUYONGBOLIXIANWEI,KEYIYONGFAPAOJINSHUDENGCAILIAODAITI;SHANGJINGYAXIANGYONGWUMIFENGDEKAOQIBANZHIZUO;ZHIZUOFENGGUANDECAILIAOBIXUTUOZHI,MIFENGDIANYONGDINGJIXIANGJIAO:WUCHENCHEJIANKONGJIANNEIDEDIANLANYEYINGCAIYONGAMCSHIFANGDIDECAILIAOZHIZUO。

  b)KONGZHISHIWAIQINRU:SHOUXIANWUCHENCHEJIANKONGJIANDENGYINGMIBI,SHIZHOUWEIHUANJINGDEAMCBUSHENRUWUCHENCHEJIAN;QICIYINGFANGZHISHIWAIKONGQIZHONGDEAMCJINRUWUCHENCHEJIANNEI,WEICIYOULIANGGEFANGMIANXUYAOKAOLV,DIYISHIXINFENGRENKOUYINGHELI,JINLIANGYUANLIPAIFENGKOUJIQITAWURANYUAN,LINGWAIJIANCHANGDIDIANYINGHELI。DIERSHIICCHANGSUOZAIDIDESHIWAIKONGQIZHONGRUHANYOUDUISHENGCHANGONGYIMINGANDEAMC,ZEZAISHIWAIKONGQISONGRUWUCHENCHEJIANQIANYINGJINXINGKEKAODECHULI,GENJUSHIWAIKONGQIZHONGAMCDEZHONGLEI、NONGDUYIJIGONGYIYAOQIUZAIXINFENGCHULIJIZUZHONGSHEZHIXIANGYINGDEHUAXUEGUOLVQI,YEKEYIZAIXINFENGCHULIJIZUZHONGSHELINXIZHUANGZHIJIAYIQUCHU。

  c)KONGZHIKUOSAN:DUIYUSHENGCHANZHONGBIXUYAOSHIYONGHUAXUEPINDEGONGYISHEBEIYINGJINLIANGCAIQUMIBICUOSHI,BINGSHEZHIKEKAODEPAIFENG,YIJIANSHAOHUAXUEPINDESANFA。LINGWAIHELIDEQILIUZUZHIDUIFANGZHIKUOSANYEHENZHONGYAO,JIEJINGXITONGSHEJISHIYINGCHONGFENKAOLVJIANSHAOGEQUYUDEQILIUJIAOCHA。

  d)HUAXUEGUOLV:CAIQULEYISHANGCUOSHISUIRANKEYIJIANGDIWUCHENCHEJIANNEIDEAMCNONGDU,DANBUKENENGWANQUANDUJUEAMCDECHANSHENG,ERYOUXIESHENGCHANGONGXUDUIAMCYOUBIJIAOMINGAN,SUIRANJIEJINGXITONGZHONGZHUANGYOUHEPA/ULPAGUOLVQI,GAIGUOLVQIDUIYUGUOLVHUICHENLIZIYOUXIAOGUO,DANDUIYUAMCJIHUBUQIZUOYONG,SUOYIYOUXIESHENGCHANQUYUHAIYINGSHEZHIHUAXUEGUOLVQI,YIQUCHUWUCHENCHEJIANNEIDEAMC。TONGCHANGZUOFASHIZAIFFUDEHFPA/ULPAGUOLVQIYUFENGJIZHIJIANZENGSHEHUAXUEGUOLVQI,ZHENDUIQUYUYIBANSHIYUNJIAO、XIANYINGQUYIJICVDQU。

  4、WUCHENCHEJIANPAIYANWENTI

  “JIEJINGCHANGFANGSHEJIGUIFAN”(GB50073_200l)[3]DUIJIEJINGCHANGFANGSHUSANZOULANGMINGQUETICHULEJIXIEPAIYANYAOQIU,DANSHIYUWUCHENCHEJIANMEIYOUMINGQUEGUIDINGYIDINGYAOSHEJIXIEPAIYAN,SHIJIGONGCHENGZHONGGEDIXIAOFANGBUMENDUIYUICCHANGFANGWUCHENCHEJIANSHIFOUSHEPAIYANDEWENTISHANGYAOQIUYEBUYIZHI;DAN8”、12”ICSHENGCHANQIYEDEYEZHUTONGCHANGHUIJIANGZHENGGECHANGFANGJINXINGTOUBAO,YOUYUICSHENGCHANZHONGYAOSHIYONGDUOZHONGYIRANDEQITIHEYETI,BAOXIANSHANGYIBANJUNYAOQIUWUCHENCHEJIANSHEZHIJIXIEPAIYANCUOSHI,FOUZEZENGJIABAOFEI。SUOYIZAI8”、12”ICGONGCHENGZHONG,WUCHENCHEJIANJIXIEPAIYANJINGCHANGSHIBUKEHUIBIDEWENTI。ICCHANGFANGWUCHENCHEJIANGUONEIWAIMUQIANCHANGYONGDEPAIYANFANGSHIYOULIANGZHONG:JIXIAPAIYANHESHANGPAIYAN。

  4.1XIAPAIYANFANGSHI

  XIAPAIYANYIBANSHIZAIWUCHENCHEJIANHUIFENGXIAJIACENGHUOHUIFENGSHUJINGNEISHEZHIPAIYANKOU,DANGWUCHENCHEJIANHUOWUCHENCHEJIANXIAJIACENGFASHENGHUOZAISHI,ZEDAKAIPAIYANKOU,KAIQIPAIYANFENGJIJINXINGPAIYAN,CISHIXINFENGJIZUJIXUYUNXING,WANGWUCHENCHEJIANSHANGJIACENGNEIBUCHONGXINFENG,BINGTONGGUOBIYAODEFAMENQIEHUANSHISHANGJIACENGYUWUCHENCHEJIANHEXIAJIACENGGEKAI,SHANGJIACENGNEIXINFENGYOUFFUSONGRUSHINEI。CAIYONGXIAPAIYANBIXUYOUYIXIATIAOJIAN,JIWUCHENCHEJIANFASHENGHUOZAISHI,WUCHENCHEJIANDINGBUFFUXIACHUIDEDUANMIANFENGSUBIXUDAYUYANQISHANGSHENGDESUDU,FOUZEYANQIHUIZAIWUCHENCHEJIANDINGBUJIJU。TONGCHANGFFUXIACHUISUDUWEI0.25~0.5m/s.ERHUOZAIDERESHIFANGLVZHIYAODAYU3kW,YANQIDESHANGSHENGSUDUJIUHUIDAYU0.5m/S[4],SUOYIXIAPAIYANFANGSHIZHISHIZAIWUCHENCHEJIANFASHENGXIAOHUOZAISHIYOUXIAO。XIAPAIYANFANGSHIZUIJINJINIANZAIGUOWAIDEYIXIEICCHANGFANGZHONGDEDAOYINGYONG,DANGUONEIGONGCHENGZHONGYONGDEJIAOSHAO。

  4.2SHANGPAIYANFANGSHI

  SHANGPAIYANSHIZAIWUCHENCHEJIANDIAODINGSHANGSHEZHIPAIYANKOU,TONGGUOPAIYANFENGGUANJIANGGEPAIYANKOULIANJIEZHIPAIYANFENGJI,DANGWUCHENCHEJIANFASHENGHUOZAISHI,DAKAIPAIYANKOU,KAIQIPAIYANFENGJIJINXINGPAIYAN,PAIYANSHIXINFENGJIZUJIXUYUNXING,XIANGHUIFENGSHUJINGNEIBUFENG.SHANGPAIYANFANGSHIWUCHENCHEJIANNEIYANQISHANGSHENGQILIUHEPAIYANQILIUFANGXIANGYIZHI,PAIYANXIAOGUOBIJIAOLIXIANG,MUQIANZAIGONGCHENGZHONGDEDAOGUANGFANDEYINGYONG。DANCAIYONGSHANGPAIYANFANGSHISHIJIGONGCHENGZHONGTONGCHANGHUICHUXIANYIXIALIANGGEWENTI,DIYIGEWENTISHIPAIYANKOUDEBUZHI,ZAIFEIDANXIANGLIUWUCHENCHEJIANZHONGBIJIAOHAOJIEJUE,YOUYUDINGBUDEFFUMEIYOUMANBU,ZHIXUZAIMANGBANCHUSHEPAIYANKOUJIKE;ERDANXIANGLIUWUCHENCHEJIANYOUYUDINGBUMANBUFFU,QIEICCHANGFANGDEWUCHENCHEJIANKUADUDOUHENDA,ZHIZAICEMIANBUZHIPAIYANKOUYOU

  BUNENGMANZUYAOQIU,SUOYIBUKEBIMIANHUICHUXIANDEYAOZAIMANBUFFUDEWUCHENCHEJIANDIAODINGSHANGSHEZHIPAIYANKOU,JULEJIEMUQIANYIYOUYIXIEZHIZAOGONGSIKAIFACHUFFUHEPAIYANKOUJIEHEZAIYIQIDECHANPIN,SHIZHEIWENTIDEYIJIEJUE。DIERGEWENTISHIPAIYANFENQUWENTI,MUQIAN8”、12”lCSHENGCHANCHANGFANGWUCHENCHEJIANJIBENSHANG

  DOUCAIYONGBallroomFANGSHI,JIEJINGMIANJIDAlWANDUOPINGFANGMIDEWUCHENCHEJIANJIHUMEIYOUFENGE,ERGONGYISHENGCHANYOUDOUCAIYONGZIDONGWULIAOCHULIXITONG(AMHS),GESHENGCHANQUYUDINGBUDOUSHEYOUZONGHENGJIAOCUODEDIAOGUACHUANSHUXITONG(OHT),HUAFENPAIYANFENQUQUESHIBIJIAOKUNNAN,SHIJIGONGCHENGZHONGJINGCHANGJIANGZHENGGEBallroomSHIWEIYIGEQU,ZHEIYOUHUIMIANLINPAIYANLIANGJIDADEWENTI,WEIJIANSHAOPAIYANXITONGFENGLIANG,ZAIMOUXIEGONGCHENGZHONGJIANGGONGYISHEBEIJUBUPAIFENGXITONGJIANZUOPAIYAN,DANPAIFENGXITONGDEGUANDAO、PEIJIANJISHEBEIYINGMANZUPAIYANYAOQIU。

  5、JIEYU

  MUQIAN8”、12”ICCHANYEZHUZHONGGUODALUDEFAZHANZHISHIGANGGANGQIBU,YOUYUGAICHANYEFUHEXINXINGGONGYEHUADEYAOQIU,LEDEDAOGUOJIAHEDIJZHENGFUDEDALIZHICHI,YUJIZHUWEILAIDEJINIANNEIJIANGHUIDEDAOKUAISUDEFAZHAN,ER8”、12”ICSHENGCHANDUIWUCHENCHEJIANKONGQIJIEJINGDUDENGGEXIANGZHIBIAOYOUJIYANGEDEYAOQIU,WUCHENCHEJIANYOUSHINENGHAODAHU,SUOYISHEJIGAILEICHANGFANGWUCHENCHEJIANSHIYINGJINXINGDUOFANGANBIJIAO,ZAIMANZUGONGYISHENGCHANYAOQIUDEQIANTIXIA,ZONGHEKAOLVKEKAOXING、LINGHUOXING、ANQUANXING、NENGYUANXIAOLV、CHUTOUZIDENGYINSUJINXINGSHEJI。

  CANKAOWENXIAN

  lGAOSHAREXUEGONGSIYOUGUANZILIAO

  2CAOFANGHAI,ZHENGMINGSHANDENGFENGJIYILVWANGJIQUJISHUYUWUCHENSHIQILIUGUOLVXUNHUANJIENENGTANTAOCRA.2001.No.5

  3GUOJIABIAOZHUN.《JIEJINGCHANGFANGSHEJIGUIFAN>.GB50073-2001

  4HUANGYAHUI.WUCHENCHEJIANHUOZAIYANLIUKONGZHIJIQIUJIESHAO.2000.03.30

  5CHENLINXINDENGBIANZHU.JIEJINGCHANGFANGSHEJIYUSHIGONG.HUAGONGCHUBANSHE,2002

  6W.WHYTF.CleanroomDesign.SecondEdition.JohnWitey&SonsLtd.1999