ZHONGGUODIANZIGONGCHENGSHEJIYUAN  QINXUELI

　　摘要

　　随着IC生产工艺技术的不断发展,对于无尘车间生产环境及其它配套系统要求也相应更为严格,本文81"、12",IC生产的无尘车间设计中有关无尘车间形式和送风方式、空气处理及温湿度保证措施,悬浮分子污染物(AMC)的控制,以及无尘车间排烟等方面的设计方案,进行了多方案的综合分析和评价。

　　引言

　　JICHENGDIANLU(IC)SHIJIDUOZHONGGAOXINJISHUYUYITIDEGAOKEJICHANPIN，TAJIHUCUNZAIYUSUOYOUGONGYEBUMEN，DUIGUOMINJINGJIDEFAZHANQIZHE“BEIZENGQI”DEZUOYONG，YINCIBEI GUOJIAZUOWEIZHANLVEXINGCHANYE。TONGSHIICCHANYEYESHIDANGJINSHIJIESHANGFAZHANZUIWEIXUNSU、JINGZHENGZUIWEIJILIEDECHANYE。YOUYUXIAYOUCHANPINDEXUYAOYIJISHENGCHANCHENGBENDEKAOLV，ICBUDUANCHAOZHETEZHENGCHICUNSUOXIAO，GUIPIANZHIJINGZENGDADEFANGXIANGFAZHAN。MUQIAN SHANGYI8”、0.25-0.18WEIMIWEIDAIBIAODEGONGYIYIJINRUDASHENGCHAN，YI12”、0.15-0.13WEIMIWEIDAIBIAODEGONGYIYEKAISHIJINRUDASHENGCHAN，YANJIUGONGZUOYIJINRUNAMIJIEDUAN，70NAMI、40NAMIDEQIJIANYIZAISHIYANSHIZHONGZHIBEICHENGGONG。

　　SUIZHEGONGYINIUCHANJISHUDEBUDUANFAZHAN，ICSHENGCHANDUIYUHUANJINGJIQITAPEITAOXITONGDEYAOQIUYEXIANGYINGYUELAIYUEYANGE，SHUODAOHUANJINGSHOUDANGQICHONGDESHIWUCHENCHEJIAN，8”、12”ICSHENGCHANWULUNDUIJIEJINGDU、WENSHIDUHAISHIKONGQIZHONGFENZIJIWURANWU(AMC)、FANGWEIZHEN、FANGJINGDIANDENGDOUYOUJIYANGEDEYAOQIU，YOUXIEKEKEDEYAOQIUSHENZHISHIMOUXIECHUANTONGDEZUOFASHOUDAOTIAOZHAN。

　　1、无尘车间形式

　　1.1WUCHENCHEJIANCONGPINGMIANBUZHIHUAFENYIBANYOUSANZHONGXINGSHI：JIKAIFANGSHI(ballroomtype)、GANGWANSHI(baycliasetype)、DAOXINGBUZHI（islandtype），RUTU1、2、3。

　　YISHANGSANZHONGXINGSHIWUCHENCHEJIANGEYOUQIYOUQUEDIAN,ICQIANGONGXUSHENGCHANCHANGTONGCHANGCAIYONGGANGWANSHIHEKAIFANGSHIWUCHENCHEJIAN，GANGWANSHIWUCHENCHEJIANZAI5”、6”ICSHENGCHANCHANGYONGDEJIAODUO，QIGONGYISHEBEIWEICHUANQIANGSHI：ER8”、12”ICSHENGCHANCHANGZEPUBIANCAIYONGKAIFANGSHIWUCHENCHEJIANJIAWEIHUANJING(mini-environment)DEFANGSHI。KAIFANGSHIWUCHENCHEJIANXIANZHUDEYOUDIANSHOUXIANSHIDUIGONGYIBUZHIDAILAIZUIDADELINGHUOXING，ZHEIYOUWEIZHONGYAO，YINWEIDANGJIN[CSHENGCHANJISHUFAZHANJIWEIXUNSU，BULUNCHANPINBENSHENYAOQIUHAISHIGONGYISHENGCHANGUOCHENGHESHENGCHANSHEBEIDOUCHUZAIBUDUANBIANHUAZHONG，ERICSHENGCHANGONGCHANGDEJIANSHEZHOUQICONGKAISHISHEJIDAOANZHUANGGONGYISHEBEITONGCHANGXUYAOYINIANBANZUOYOUDESHIJIAN，ZAIZHEIDUANSHIJIANNEIDINGYISHENGCHANJISHUYIJIGONGYIMEIBEIXUYAOBUDUANDEDIAOZHENGHEGENGXIN，ZHIYOU

　　ZHEIYANGCAIKEYIBAOZHENGTOUCHANSHIQISHENGCHANJISHUXIAOHUICHUYULUOHOUDEJIONGDI，JISHITOUCHANYIHOU，YEHUIYINCHANPIN、SHICHANGJISHENGCHANJISHUDENGYINSUDEBIANHUAERXUYAODUISHENGCHANXIANJINXINGGAIZAOYIDIAOZHENGCHANPINHECHANNENG。QICI8”、12”ICSHENGCHANDUIHUANJINGYOUQISHIJIEJINGDUSHUAQIUJIWEIYANGE，TONGCHANGGUIPIANBAOLUQU（JIAGONGGUOCHENG）YAOQIU1.5JI（209E，O.lμm，1JI）．CAIYONGKAIFANGSHIWUCHENCHEJIANJIAWEIHUANJINGFANGSHIZAIPEITAOZIDONGWULIAOCHULIXITONGautomatedmaterialhandlingsystem.AMHS)，YIFANGMIANKOUKEYISHICAOZUORENYUANHEQITAWURANYUANYUGUIPIANWANQUANGELI，LINGYIFANGMIANSHENGCHANZIDONGHUACHENGDUDETIGAODUITIGAOGUIPIANCHENGPINLVJIWEIYOULI。KAIFANGSHIWUCHENCHEJIANJIAWEIHUANJINGFANGSHI，GONGYISHENGCHANZHIYAOQIUWEIHUANJINGNEIYOUHENYANGEDEJIEJINGDU，ERKAIFANGSHIWUCHENCHEJIANZHIXUBAOZHENG5-6JI，ZHEIYANGYANGEYAOQIUDEJIEJINGDUQUYUDADAJIANSHAO，BAOZHENGJIEJINGDUSUOXUDEXUNHUANKONGQILIANGYEXIANGYINGJIANSHAO，NENGHAODADAJIANGDI，TONGCHANGQINGKUANGXIAKAIFANGSHIWUCHENCHEJIANJIAWEIHUANJINGFANGSHIQIWEICHIJIEJINGDUSUOXUDENENGHAODAYUEJINWEIGANGWANSHIWUCHENCHEJIANDE1/3[]。SHIJIGONGCHENGZHONGWEIHUANJINGSHIYOUSHEBEIZIDAIDEHEKAIFANGSHIWUCHENCHEJIANWANQUANTUOKAI，ZAIJIASHANGKAIFANGSHIWUCHENCHEJIANBENSHENJIEGOUJIANDAN，DONGLISHEBEIJIANSHAO，ZHEIYANGWULUNCONGSHEJIDAOJIANZAODOUBIANDEJIANDANKUAIJIE，KEYISUODUANJIANZAOSHIJIAN。

　　CAIYONGKAIFANGSHIWUCHENCHEJIANJIAWEIHUANJINGFANGSHI，QUEBAOGUIPIANJIAGONGGUOCHENGSUOXUDEJIEJINGDUDEGUANJIANQUYUSHIWEIHUANJING，WEIHUANJINGTONGCHANGRUTU4、TU5SUOSHI。

　　TU4SUOSHIDEWEIHUANJINGDESONGFENGSHIYOUWUCHENCHEJIANSONGFENGXITONGTIGONG，QIQUEDIANSHIBULINGHUO，YIDONGHUOZENGJIAGONGYISHEBEIBUFANGBIAN。MUQIAN8”、12”ICSHENGCHANXIANSUOYONGDEWEIHUANJINGJIBENSHANGSHITU5DEXINGSHI（GUANGKEJICHUWAI），WEIHUANJINGQUANBUYOUGONGYISHEBEIZIDAI，YUGONGYISHEBEIJINMIJIEHEZAIYIQI，BINGQIEYUZHUANGZAITAI、QIANKAIKOUCHUANDIHE(frontopeningunifiedpods．FOUP)、DIAOGUACHUANSHUXITONG(ovcerheadhoisttransport，OHT)YOUJIJIEHE。WEIHUANJINGXITONGDEFENGJIZHIJIEXISHINEIDEKONGQI，JINGULPGUOLVQICHULIHOUCHUIZHIXIACHUI，YIBAOZHENGGUIPIANBAOLUQUYANGEDEJIEJINGDUYAOQIU。WEIHUANJINGNEIDESONGFENGDUANMIANFENGSUTONGCHANGBAOCHIZAI0.2-0.45m/s，BINGBAOZHENGGUOLVQICHUKOUDUANMIANSHANGRENYIYIDIANDEFENGSUBUCHAOGUOPINGJUNFENGSUDE±20%，GUOGAODEFENGSUHUISHIWEIHUANJINGDEWENDUPIANGAO。WEIHUANJINGDEFENGJIYINGWEIBIANPINFENGJIYISHIYINGGUOLVQIDEZULIBIANHUA，SUOYONGGUOLVQIDEXIAOLV≥99.99995%(MPPS)。WEIBIMIANZHOUWEI“ZANG”KONGQISHENRUWEIHUANJING，WEIHUANJINGXIANGDUIYUZHOUWEIHUANJING（KAIFANGSHIWUCHENCHEJIAN）YINGBAOCHIBUDIYU1.25PaDEZHENGYA，ZHEIKEYITONGGUODIAOJIEDIBUDEHUIFENGFAMENSHIXIAN。8”、12”ICSHENGCHANDUIFANGWEIZHENYAOQIUJIGAO，ERWEIHUANJINGSUOYONGDEFENGJIJINKAOSHENGCHANSHEBEI，SUOYIFENGJIYUSHEBEIWENYINGSHEYOUXIAOJIANZHENCUOSHI，BINGQIEFENGJIBENSHENCHANSHENGDEZHENDONGZAI3-100HzPINDUANNEIRENYIYIGEPINLVDIANDEZHENDONGWEIYIFUZHI≤1.25μm。

　　1.2、WUCHENCHEJIANCONGSONGFENGXITONGFANGSHIHUAFENYIBANYEYOUSANZHONGXINGSHI：JIJIZHONGSONGFENGXITONG(centralsystem)、SUIDAOXITONG(tunnelsysterm、FFUXITONG(fanfilterunitsystem)，RUTU6、7、8。

ZHEISANZHONGSONGFENGXITONGGEYOUTEDIAN，CONGBUTONGDEJIAODUBIJIAOHUIDECHUBUTONGDEJIELUN，SUOYIBUNENGJIANDANDISHUOSHUYOUSHULIE，SONGFENGXITONGFANGSHIDECAIYONGZHUYAOQUJUEYUYEZHU、SHEJIRENYUANDEGUANZHUDIANCEZHONGYUNAXIEFANGMIAN。BUGUOFFUXITONGJINJINIANLAIDEDAOYUELAIYUEGUANGFANDESHIYONG，YOUQISHIZAIYATAIDIQU。GUONEIYEBULIWAI，YIJIANDEHEZAIJIANDE8”、12”ICSHENGCHANCHANGFANGJIHUDOUCAIYONGFFUXITONG，HENDUO5”、6”ICSHENGCHANCHANGFANGJINJINIANYECAIYONGFFUXITONG。JIUQIYUANYIN，CHULEXIGUAN、JINGYANDENGFEIJISHUXINGYINSUZHIWAI，BUWAIHUYOUYIXIAJIGEYUANYIN：

　　a)LINGHUOXING：ZAISANZHONGXITONGZHONG，FFUXITONGDELINGHUOXINGSHI DE，ZHEIDIANTEBIESHIYINGDANGJINICSHENGCHANJISHUFEISUFAZHANDEYAOQIU，YOUYUSUIZHECHANPINSHENGCHANGONGYIDEFAZHANJIEJINGDUDENGJIXUQIUYEHUIBUDUANYANGE。SUIDAOXITONGJIHUTANBUSHANGLINGHUOXING，QIESUIDAOXITONGSHIYICAOZUOQUZUOWEISONGFENG、SHEBEIQUZUOWEIHUIFENGDEKONGQIXUNHUANXITONG，DAN8”、12”ICCHANGFANGWUCHENCHEJIANRIQIANJIBENSHANGDOUCAIYONGBallroomFANGSHI，，f：FENCAOZUOQUHESHEBEIQU，YINCISUIDAOXITONGYEJIUBUSHIYONGJ；JIZHONGSONGFENGXITONGYOUYIDINGDELINGHUOXING，DANJIEJINGXITONGGAIZAOSHIBIXUTINGJI、TINGCHAN。RUGUOYAOTIGAOJUBUQUYUDEJIEJINGDU，CHULEWUCHENCHEJIANDINGBUYAOZENGJIAHEPA/ULPAGUOLVQIWAI，HAIXUZENGSHEXUNHUANJIZU，CONGERSHIGAIZAONANDUDA，ERQIEDUISHENGCHANYOUJIAODAYINGXIANG；CAIYONGFFUXITONG，JUBUZENGJIAFFUTAISHUHUOYIDONGFFUWEIZHIJUNHENRONGYISHIXIAN，ERQIEKEYIZAIBUTINGCHANDEQINGKUANGXIAJINXING，DUISHENGCHANJIHUMEIYOUYINGXIANG。

　　b)DIAOKONGXING：HEJIZHONGSHISONGFENGXITONGXIANGBI，FFUXITONGGEQUKONGQIJIAOCHADEQINGKUANGXIANGDUIYAOSHAO，KEYISHIXIANJIAOGAOJINGDUDEWENSHIDUKONGZHI。SUIZHEDIANJIYUWANGLUOKONGZHIJISHUDEFAZHAN，FFUHENRONGYISHIXIANDANTAIKONGZHI，MEITAIFFUCHUFENGSUDUZAIYIDINGFANWEINEIJIHUKEYIRENYIDIAOJIE，ZHEIYANGJIUHENRONGYIJIEJUEDAKUADUWUCHENCHEJIANYUANJINDUANQILIUBUJUNYUNDEWENTI。LINGWAIFFUHAIKEYIGENJUSHIJISHIYONGXUYAOTINGKAIHUOSHAOKAIQIYIBUFEN。

　　c)KEKAOXING：CAIYONGJIZHONGSONGFENGXITONGZHIYAOYITAISONGFENGJIZUCHUXIANGUZHANG，ZHENGGEXITONGDEJIEJINGDUJIUDEBUDAOBAOZHENG，CHUFEIYOUBEIYONGJIZUNENGLIJITOURUYUNXING；DUIYUSUIDAOXITONGYIDANMOUYITAIXUNHUANJIZUTINGZHIYUNXING，GAIXUNHUANJIZUSUOFUDANDEJIEJINGQUYUDEJIEJINGDU、WENSHIDUJIUWUFABAOZHENG，SHENGCHANYEZHIHAOTINGZHI；ERFFUXITONGZHEIFANGMIANDEFENGXIANXIANGDUIYAOXIAODEDUO，JISHIYOUYITAIFFUCHUXIANGUZHANG，QIYINGXIANGMIANHENXIAOLINGWAISUIZHEWANGLUOJIANKONGJISHUDEFAZHAN，FFUXITONGYINSHULIANGDUOERZAOCHENGWEIHUBUBIANDEQINGKUANGYEYIDEDAOGAISHAN。

　　d)QIMIXINGYUKONGJIANLIYONG：FFUXITONGYOUYUFENGJIZHIJIESHEZAIGONGZUOQUSHANGFANG，YINCIGONGZUOQUXIANGDUIYUHUIFENGDAOJISHANGJINGYAXIANGWEIZHENGYA，GONGZUOQUYIWAIWURANWUJISHAOYINXIELOUJINRUSHANGZUOQU：XIANGFANDE，JIZHONGSONGFENGXITONGHESUIDAOXITONGGONGZUOQUXIANGDUIYUSHANGJINGYAXIANGWEIJIAODADEFUYA，YINCIXIELOUDEFENGXIANXINGBIFFUXITONGYAOGAODEDUO。LINGWAICAIYONGJIZHONGSONGFENGXITONGJISUIDAOXITONG，SHANGJINGYAXIANGYUZHOUWEIHUANJINGDEYACHAHENDA，JIYIFASHENGKONGQIXIELOU，YINCIDUISHANGJINGYAXIANGDEQIMIXINGYAOQIUHENGAO，JIBENSHANGBUYUNXUGUANXIANJINREN。ERFFUXITONGDESHANGJINGYAXIANGXIANGDUIYUZHOUWEIHUANJINGZHISHIWEIZHENGYA，SHANGJINGYAXIANGNEIKEYIBUZHIHUOCHUANYUEZHURUPAIFENGHEPAIYANDENGGUANDAO，SHIKONGJIANDEDAOHELILIYONG。

　　e)NENGHAOWENTI：YIXIETONGJIZILIAOBIAOMING，ZAIICCHANGFANGZHONG，WEICHISHENGCHANHUANJINGJIEJINGDUDEKONGQIXUNHUANGUOLVXITONGSHICHUGONGYISHEBEIWAIDEHAONENGZUIDADEXITONG，SUOYICAIYONGHEZHONGSONGFENGXITONGQINENGHAOYESHIBIXUKAOLVDEYINSU。DAXINGZHOULIUFENGJIDEQUANYAXIAOLVLIXIANGSHANGKEDA80%，DIANJIXIAOLVYIBANKEDA90%，ZEYONGDIANXIAOLVSHILIANGZHEDECHENGJI72%，RUGUOKAOLVXIAOYINQIDUIFENGYAZAOCHENGDESUNSHI，SHIFENGJIQUANYAXIAOLVJIANGZHI70%，ZEYONGDIANXIAOLVYESUIZHIJIANGDAO63%（JIASHEDIANJIXIAOLVBUBIAN）；8”、12”ICCHANGFANGWUCHENCHEJIANZHONGDEFFUTONGCHANGCAIYONGZHILIUWUSHUADIANJI，XIAOLVYEKEDADAO90%[2]，TONGCHANGYONGDIANXIAOLVZAI50%ZUOYOU。SUOYIZAI DEYUNXINGZHUANGTAIXIA，DAXINGZHOULIUFENGJIDEDANJIYONGDIANXIAOLVGAOYUXIAOXINGFFUYINGGAISHIMEIYOUSHENMEYIWENDE。DANSHIJIGONGCHENGQINGKUANGYOUZENYANGNI？YOUYUZHILIUWUSHUADIANJIKEYIZAIXIANGDANGDADEYUNXINGFANWEILIBAOCHIGAOXIAOLVCHULI，ERDAXINGZHOULIUFENGJIZAIBIANPINYUNZHUANHOUDIANJIXIAOLVHUIJIJUXIAJIANG，DANJIEJINGXITONGZHONGHEPA/ULPADEZULISHIBUDUANBIANHUADE，QIECHU、ZHONGZULIXIANGCHAJIAODA，SUOYIZAIXIANGDANGZHANGDESHIJIANNEIFENGJISHIZAIFEISHEJIZHUANGTAIYUNXING，CONGZHEIFANGMIANKAOLVFFUXITONGYOUHUIJUYOUYIDINGYOUSHI。SUOYIDUIJIZHONGSONGFENGXITONGHEFFUXITONGDENENGYUANXIAOLVBIJIAO，HENNANZUOCHUMINGQUEDEJIELUN，YINGSHIJUTIGONGCHENGXIANGMUDECHANPINSHENGCHANQINGKUANG、JINGHUAKONGDIAOXITONGJIQISHEBEIPEIZHIQINGKUANGDENGQUEDING。

　　2、空气处理及温湿度保证

　　8”、12”ICSHENGCHANYOUYUQIGONGYIJIAGONGXIANKUANJIXIAO，SUOYIDUIWENSHIDUDEJINGDUYAOQIUHENGAO，TONGCHANGWENDUJINGDUWEI±0.3～±0.5℃，XIANGDUISHIDUJINGDUWEI±2%～±3%。GAILEICHANGFANGWUCHENCHEJIANYIBANCAIYONGXINFENGJIZHONGCHULIJIAFFUXITONG，ZAIXIAJIACENGHUOSHANGJINGYAXIANGNEISHEGANBIAOLENGQI。WUCHENCHEJIANNEIDEXIANG

　　DUISHIDUYOUXINFENGJIZUBAOZHENG，WENDUYOUGANBIAOLENGQIBAOZHENG。

　　2.1、XINFENGCHULIJIXIANGDUISHIDUBAOZHENG

　　XINFENGCHULIJIZUDEGONGNENGDUANRUTU9SUOSHI，XINFENGCHULIJIZUZHONGSHEZHICHU、ZHONG、GAOXIAOSANJIGUOLV，YIQUCHUSHIWAIKONGQIZHONGDEHUICHENLIZI，SHEGAOXIAOGUOLVQIHENYOUBIYAOKEYIYANZHANGWUCHENCHEJIANDINGBUFFUNEIULPAGUOLVQIDESHIYONGSHOUMING；

　　设置化学过滤器主要是去除室外空气中对IC生产有影响的杂质气体，根据工厂所在地的室外空气品质设置相应的化学过滤器，化学过滤器后通常需设中效过滤器以去除化学过滤器本身的产尘；通过设在新风处理机组内的两级表冷、两级加热以及洁净蒸汽加湿器保证新风处理机组出口的干球温度及露点温度全年基本恒定，而机组出口的露点温度还应根据其对应送风区域内的相对湿度进行连续的重新整定，以保证室内的相对湿度。这里不以房间内的相对湿度直接控制加湿器或表冷器，而以房间内的相对湿度连续的重新整定机组出口的露点温度，再由该露点温度控制加湿器或表冷器是为了得到更及时的湿度控制：由于外网蒸汽中含有对IC生产有影响的杂质，新风处理机组的加湿应采用洁净蒸汽。洁净蒸汽加湿器通常设在表冷器前，这样可以使新风处理机组确提高相对湿度控制精度的潜能。有些工程中是以喷淋初级纯水（一级RO后）代替洁净蒸汽加湿器，这是一举两得的好办法，因为喷淋纯水既可以达到加湿的目的，又可以去除空气中对IC牛产有影响的杂质气体。新风处理机组还应保证无尘车间内的正压，所以新风机组内的风机应配置变频装置，以无尘车间内的正压值控制风机转速。新风集中处理有诸多优点，但在寒冷地区使用时则特别要注意盘管的防冻问题。另外因8”、12”IC生产对环境的可靠性有极高的要求，新风处理机组必须设一台备用机组。
 

　　2.2、XUNHUANFENGCHULIJIWENDUBAOZHENG

　　8”、12”ICCHANGFANGWUCHENCHEJIANTONGCHANGCAIYONGFFUXITONG（RUTU8），SHINEIKONGQIJINGGANBIAOLENGQILENGQUECHULIHOUYUXINFENGHUNHE，ZAIYOUSHEZAIFANGWENDINGBUDEFFUJIAYA、GUOLVHOUSONGRUFANGJIAN。HAIYOUYIZHONGQINGKUANGSHIGANBIAOLENGQISHEZAISHANGJIACENG，KONGQICHULIGUOCHENGLVEYOUBUTONG，QIGUOCHENGWEI：XINFENGHEHUIFENGHUNHE，ZAIJINGQIANBIAOLENGQILENGQUE，ZUIHOUYOUFFUJIAYA、GUOLVHOUSONGRENWUCHENCHEJIAN。GANBIAOLENGQIZHUYAOSHIXIAOCHUWUCHENCHEJIANNEIDEXIANREFUHE，GENJUWUCHENCHEJIANNEIDEWENDUKONGZHIDUIYINGQUYUDEGANBIAOLENGQIYIBAOZHENGFANGWENDEWENDU。CAIYONGGAIXITONGYINGZHUYIYIXIAJIDIAN：

　　a)WEIDEDAOJINGQUEDEWENSHIDUKONGZHI，YINGJINLIANGJIANSHAOBallroomNEIGEQUYUZHIWENDEQILIUJIAOCHA，SUOYIGEQUYUDEGANBIAOLENGQIJIEGOUXINGSHI、KONGQICEZULIYINGJINLIANGYIZHI。

　　b)KAOLVSHINEISHIDUJINGDUJIBIAOLENGQIKONGQICEZULIDENGYINSU，YINGQUEBAOGANBIAOLENGQIZAIGANGONGKUANGXIAGONGZUO，GANBIAOLENGQISUOYONGDELENGDONGSHUIWENDUYINGGENJUSHINEISHIFUHE、SHINEIKONGQIDELUDIANWENDUDENGYINSUQUEDING，ICCHANGFANGGONGYISHENGCHANSHEBEIFASHILIANGHENSHAO，KAOLVGANBIAOLENGQISUOYONGLENGDONGSHUIBENSHENDEWENDUKONGZHIJINGDUYIJIQITADEANQUANYULIANG，SHIJIGONGCHENGZHONGYIBANLENGDONGSHUIGONGSHUIWENDUBISHINEIKONGQILUDIANWENDUGAO2～3℃，WENCHATONGCHANGQU3～5℃，GENJUSHINEIWENDUKONGZHIJINGDUQUEDING。GANBIAOLENGQISUOYONGDELENGDONGSHUITONGCHANGYIHUNSHUIFANGSHIHUOHUANREFANGSHIDEDAO。

　　c)GANBIAOLENGQIDUANMIANFENGSUBUYITAIGAO，YINWEIGUOGAODEFENGSUHUISHIGANBIAOLENGQIKONGQICEZULIPIANDA，ERYOUYUFANGJIANZAOSHENGYAOQIUDEXIANZHIFFUSUONENGTIGONGDEJIWAIYUYAYOUXIAN，YIBANWEI90Pa，KAOLVQITAFENGLUZULI，GANBIAOLENGQIDEKONGQICEZULITONGCHANGKONGZHIZAI40PaZUOYOU。

　　3、空气中分子级污染物(AMC)控制

　　SUIZHElCSHENGCHANDEFEISUFAZHAN，QIJIAGONGDETEZHENGCHICUNYUELAIYUEWEIXIHUA，QUCHUKONGQIZHONGDEAMC(airbomemolecularcontamination)WENTIYUELAIYUESHOUDAORENMENGUANZHU， BANDAOTIZHIZAOJISHUXIEHUI(SEMATECH)JIQITAJIGOU、ZUZHIDUIICSHENGCHANZHONGAMCDEWEIHAIHEYUNXUNONGDUFENBIEJINXINGLEFENXIYUCE，BIAOlSHISEMATECHSUOYUCEDE BANDAOTIFAZHANJINCHENGJIXIANGYINGDEAMCDEYAOQIU。YIXIEYANJIUJIEGUOBIAOMING，KONGQIZHONGDEJINSHULIZI(Na、K、Fe、Cu、ZnDENG)HUIPOHUAIJUEYUANCENG，SHIp-nJIELOUDIAN；ERDANYANGHUAWU、ERYANGHUALIU、AN、YOUJIWU、CHOUYANG、PENG、LINDENGDOUHUIYINQIDIANLUQUEXIAN。AMCYIZHIJIEYINGXIANGDAOCHANPINDECHENGPINLVHEKEKAOXING，SUOYIYINGJIAYIKONGZHI。

　　3.1AMCDELAIYUAN

　　AMCLAIYUANYUWUCHENCHEJIANNEIJISHIWAIKONGQI。WUCHENCHEJIANNEIDEAMCZHUYAOLAIYUANYUYIXIAJIGEFANGMIAN：GONGYINIUCHANSHIYONGDEGEZHONGHUAXUEPIN，GONGYISHEBEIHEYUANCAILIAODEQITISHIFANG，SHINEICAOZUORENYUANYIJIGEZHONGJIANZHUCAILIAODENG。SHIWAIKONGQIZHONGDEAMCDUOSHAOYUICCHANGFANGSUOZAIDIDEKONGQIZHILIANGYOUGUAN，QIEDIFANGCHAYIXINGJIAODA，TONGCHANGYUESHIGONGCHANGJIZHONGDEGONGYEQULAIZISHIWAIDEAMCJIUYUEYANZHONG。

　　3.2AMCDEKONGZHI

　　JIANSHAOWUCHENCHEJIANNEIDEAMCYINGCONGYIXIASIGEFANGMIANJINXINGKONGZHI：

　　a)KONGZHISHINEICHANSHENG：GONGYISHENGCHANXIANBENSHENSHIAMCZUIDADECHANSHENGYUAN，YINGONGYISHENGCHANZHONGYAOSHIYONGGEZHONGHUAXUEPIN，ZHEIXIEHUAXUEPINHUODUOHUOSHAODEYAOSANFADAOSHINEIKONGQIZHONGXINGCHENGAMC，SUOYISHOUXIANYINGCONGSHENGCHANGONGYISHANGKAOLVJINLIANGJIANSHAOHUAXUEPINDESHIYONG，LINGWAIYINGKONGZHIGONGYISHEBEIDEZHIZUOCAILIAO、TULIAODESHIFANGQITI。WUCHENCHEJIANDEGEZHONGJIANZHUCAILIAOYESHIAMCDEYIDALAIYUAN，JIANZHUCAILIAOYINQIDEAMCSHEJIMIANJIAOGUANG，MUQIANTONGCHANGCAIQUYIXIACUOSHI：JINLIANGCAIYONGAMCSHIFANGDIDEJIANZHUZHUANGXIUCAILIAO、TULIAOJIMIFENGCAILIAO，MUQIANCHANGYONGDEJIANCAIZHONGJUSIFUYIXI、BOLI、BUXIUGANG、LVHEJIN、BIAOMIANJINGKAOQICHULIDEJINSHUCAILIAO、GAODANXINGJUANZHITULIAO、HUANYANGCIQIDENGSHIKEYIJIESHOUDE，ERHUANYANGSHUZHITULIAO、GUI

　　MIFENGJIAO、DAN/SHUANGMIANMIFENGJIAODAI、ZURANJIYIBUSHIYONGLE；GAIJINJIANZHUCAILIAOJIAGONGGONGYI，TIGAOJIAGONGJINGDU，GONGCHENGZHONGJINLIANGBUYONGMIFENGJIAO；JIEJINGXITONGZHONGDEHEPA/ULPAGUOLVQIYINGCAIYONGJUSIFUYIXI(PTFE)HUODIPENGDIYOUJIWUDEBOLIXIANWEIZHIZUO，LINGWAIMUQIANCHANGYONGDEDOPCESHIFANGFAYIJINAYANCESHIYESHIBUNENGJIESHOUDE，SEMATECHTUIJIANCAIYONGYIQULIZISHUIWUXIEDAIDEGUTAIJUBENYIXI(polystyrenelatex，PSL)XIAOQIUZUOWEICESHILIZI；XITONGZHONGDEXIYINCAILIAOJINLIANGBUYONGBOLIXIANWEI，KEYIYONGFAPAOJINSHUDENGCAILIAODAITI；SHANGJINGYAXIANGYONGWUMIFENGDEKAOQIBANZHIZUO；ZHIZUOFENGGUANDECAILIAOBIXUTUOZHI，MIFENGDIANYONGDINGJIXIANGJIAO：WUCHENCHEJIANKONGJIANNEIDEDIANLANYEYINGCAIYONGAMCSHIFANGDIDECAILIAOZHIZUO。

　　b)KONGZHISHIWAIQINRU：SHOUXIANWUCHENCHEJIANKONGJIANDENGYINGMIBI，SHIZHOUWEIHUANJINGDEAMCBUSHENRUWUCHENCHEJIAN；QICIYINGFANGZHISHIWAIKONGQIZHONGDEAMCJINRUWUCHENCHEJIANNEI，WEICIYOULIANGGEFANGMIANXUYAOKAOLV，DIYISHIXINFENGRENKOUYINGHELI，JINLIANGYUANLIPAIFENGKOUJIQITAWURANYUAN，LINGWAIJIANCHANGDIDIANYINGHELI。DIERSHIICCHANGSUOZAIDIDESHIWAIKONGQIZHONGRUHANYOUDUISHENGCHANGONGYIMINGANDEAMC，ZEZAISHIWAIKONGQISONGRUWUCHENCHEJIANQIANYINGJINXINGKEKAODECHULI，GENJUSHIWAIKONGQIZHONGAMCDEZHONGLEI、NONGDUYIJIGONGYIYAOQIUZAIXINFENGCHULIJIZUZHONGSHEZHIXIANGYINGDEHUAXUEGUOLVQI，YEKEYIZAIXINFENGCHULIJIZUZHONGSHELINXIZHUANGZHIJIAYIQUCHU。

　　c)KONGZHIKUOSAN：DUIYUSHENGCHANZHONGBIXUYAOSHIYONGHUAXUEPINDEGONGYISHEBEIYINGJINLIANGCAIQUMIBICUOSHI，BINGSHEZHIKEKAODEPAIFENG，YIJIANSHAOHUAXUEPINDESANFA。LINGWAIHELIDEQILIUZUZHIDUIFANGZHIKUOSANYEHENZHONGYAO，JIEJINGXITONGSHEJISHIYINGCHONGFENKAOLVJIANSHAOGEQUYUDEQILIUJIAOCHA。

　　d)HUAXUEGUOLV：CAIQULEYISHANGCUOSHISUIRANKEYIJIANGDIWUCHENCHEJIANNEIDEAMCNONGDU，DANBUKENENGWANQUANDUJUEAMCDECHANSHENG，ERYOUXIESHENGCHANGONGXUDUIAMCYOUBIJIAOMINGAN，SUIRANJIEJINGXITONGZHONGZHUANGYOUHEPA/ULPAGUOLVQI，GAIGUOLVQIDUIYUGUOLVHUICHENLIZIYOUXIAOGUO，DANDUIYUAMCJIHUBUQIZUOYONG，SUOYIYOUXIESHENGCHANQUYUHAIYINGSHEZHIHUAXUEGUOLVQI，YIQUCHUWUCHENCHEJIANNEIDEAMC。TONGCHANGZUOFASHIZAIFFUDEHFPA/ULPAGUOLVQIYUFENGJIZHIJIANZENGSHEHUAXUEGUOLVQI，ZHENDUIQUYUYIBANSHIYUNJIAO、XIANYINGQUYIJICVDQU。

　　4、WUCHENCHEJIANPAIYANWENTI

　　“JIEJINGCHANGFANGSHEJIGUIFAN”(GB50073_200l)[3]DUIJIEJINGCHANGFANGSHUSANZOULANGMINGQUETICHULEJIXIEPAIYANYAOQIU，DANSHIYUWUCHENCHEJIANMEIYOUMINGQUEGUIDINGYIDINGYAOSHEJIXIEPAIYAN，SHIJIGONGCHENGZHONGGEDIXIAOFANGBUMENDUIYUICCHANGFANGWUCHENCHEJIANSHIFOUSHEPAIYANDEWENTISHANGYAOQIUYEBUYIZHI；DAN8”、12”ICSHENGCHANQIYEDEYEZHUTONGCHANGHUIJIANGZHENGGECHANGFANGJINXINGTOUBAO，YOUYUICSHENGCHANZHONGYAOSHIYONGDUOZHONGYIRANDEQITIHEYETI，BAOXIANSHANGYIBANJUNYAOQIUWUCHENCHEJIANSHEZHIJIXIEPAIYANCUOSHI，FOUZEZENGJIABAOFEI。SUOYIZAI8”、12”ICGONGCHENGZHONG，WUCHENCHEJIANJIXIEPAIYANJINGCHANGSHIBUKEHUIBIDEWENTI。ICCHANGFANGWUCHENCHEJIANGUONEIWAIMUQIANCHANGYONGDEPAIYANFANGSHIYOULIANGZHONG：JIXIAPAIYANHESHANGPAIYAN。

　　4.1XIAPAIYANFANGSHI

　　XIAPAIYANYIBANSHIZAIWUCHENCHEJIANHUIFENGXIAJIACENGHUOHUIFENGSHUJINGNEISHEZHIPAIYANKOU，DANGWUCHENCHEJIANHUOWUCHENCHEJIANXIAJIACENGFASHENGHUOZAISHI，ZEDAKAIPAIYANKOU，KAIQIPAIYANFENGJIJINXINGPAIYAN，CISHIXINFENGJIZUJIXUYUNXING，WANGWUCHENCHEJIANSHANGJIACENGNEIBUCHONGXINFENG，BINGTONGGUOBIYAODEFAMENQIEHUANSHISHANGJIACENGYUWUCHENCHEJIANHEXIAJIACENGGEKAI，SHANGJIACENGNEIXINFENGYOUFFUSONGRUSHINEI。CAIYONGXIAPAIYANBIXUYOUYIXIATIAOJIAN，JIWUCHENCHEJIANFASHENGHUOZAISHI，WUCHENCHEJIANDINGBUFFUXIACHUIDEDUANMIANFENGSUBIXUDAYUYANQISHANGSHENGDESUDU，FOUZEYANQIHUIZAIWUCHENCHEJIANDINGBUJIJU。TONGCHANGFFUXIACHUISUDUWEI0.25～0.5m/s．ERHUOZAIDERESHIFANGLVZHIYAODAYU3kW，YANQIDESHANGSHENGSUDUJIUHUIDAYU0.5m/S[4]，SUOYIXIAPAIYANFANGSHIZHISHIZAIWUCHENCHEJIANFASHENGXIAOHUOZAISHIYOUXIAO。XIAPAIYANFANGSHIZUIJINJINIANZAIGUOWAIDEYIXIEICCHANGFANGZHONGDEDAOYINGYONG，DANGUONEIGONGCHENGZHONGYONGDEJIAOSHAO。

　　4.2SHANGPAIYANFANGSHI

　　SHANGPAIYANSHIZAIWUCHENCHEJIANDIAODINGSHANGSHEZHIPAIYANKOU，TONGGUOPAIYANFENGGUANJIANGGEPAIYANKOULIANJIEZHIPAIYANFENGJI，DANGWUCHENCHEJIANFASHENGHUOZAISHI，DAKAIPAIYANKOU，KAIQIPAIYANFENGJIJINXINGPAIYAN，PAIYANSHIXINFENGJIZUJIXUYUNXING，XIANGHUIFENGSHUJINGNEIBUFENG．SHANGPAIYANFANGSHIWUCHENCHEJIANNEIYANQISHANGSHENGQILIUHEPAIYANQILIUFANGXIANGYIZHI，PAIYANXIAOGUOBIJIAOLIXIANG，MUQIANZAIGONGCHENGZHONGDEDAOGUANGFANDEYINGYONG。DANCAIYONGSHANGPAIYANFANGSHISHIJIGONGCHENGZHONGTONGCHANGHUICHUXIANYIXIALIANGGEWENTI，DIYIGEWENTISHIPAIYANKOUDEBUZHI，ZAIFEIDANXIANGLIUWUCHENCHEJIANZHONGBIJIAOHAOJIEJUE，YOUYUDINGBUDEFFUMEIYOUMANBU，ZHIXUZAIMANGBANCHUSHEPAIYANKOUJIKE；ERDANXIANGLIUWUCHENCHEJIANYOUYUDINGBUMANBUFFU，QIEICCHANGFANGDEWUCHENCHEJIANKUADUDOUHENDA，ZHIZAICEMIANBUZHIPAIYANKOUYOU

　　BUNENGMANZUYAOQIU，SUOYIBUKEBIMIANHUICHUXIANDEYAOZAIMANBUFFUDEWUCHENCHEJIANDIAODINGSHANGSHEZHIPAIYANKOU，JULEJIEMUQIANYIYOUYIXIEZHIZAOGONGSIKAIFACHUFFUHEPAIYANKOUJIEHEZAIYIQIDECHANPIN，SHIZHEIWENTIDEYIJIEJUE。DIERGEWENTISHIPAIYANFENQUWENTI，MUQIAN8”、12”lCSHENGCHANCHANGFANGWUCHENCHEJIANJIBENSHANG

　　DOUCAIYONGBallroomFANGSHI，JIEJINGMIANJIDAlWANDUOPINGFANGMIDEWUCHENCHEJIANJIHUMEIYOUFENGE，ERGONGYISHENGCHANYOUDOUCAIYONGZIDONGWULIAOCHULIXITONG(AMHS)，GESHENGCHANQUYUDINGBUDOUSHEYOUZONGHENGJIAOCUODEDIAOGUACHUANSHUXITONG(OHT)，HUAFENPAIYANFENQUQUESHIBIJIAOKUNNAN，SHIJIGONGCHENGZHONGJINGCHANGJIANGZHENGGEBallroomSHIWEIYIGEQU，ZHEIYOUHUIMIANLINPAIYANLIANGJIDADEWENTI，WEIJIANSHAOPAIYANXITONGFENGLIANG，ZAIMOUXIEGONGCHENGZHONGJIANGGONGYISHEBEIJUBUPAIFENGXITONGJIANZUOPAIYAN，DANPAIFENGXITONGDEGUANDAO、PEIJIANJISHEBEIYINGMANZUPAIYANYAOQIU。

　　5、JIEYU

　　MUQIAN8”、12”ICCHANYEZHUZHONGGUODALUDEFAZHANZHISHIGANGGANGQIBU，YOUYUGAICHANYEFUHEXINXINGGONGYEHUADEYAOQIU，LEDEDAOGUOJIAHEDIJZHENGFUDEDALIZHICHI，YUJIZHUWEILAIDEJINIANNEIJIANGHUIDEDAOKUAISUDEFAZHAN，ER8”、12”ICSHENGCHANDUIWUCHENCHEJIANKONGQIJIEJINGDUDENGGEXIANGZHIBIAOYOUJIYANGEDEYAOQIU，WUCHENCHEJIANYOUSHINENGHAODAHU，SUOYISHEJIGAILEICHANGFANGWUCHENCHEJIANSHIYINGJINXINGDUOFANGANBIJIAO，ZAIMANZUGONGYISHENGCHANYAOQIUDEQIANTIXIA，ZONGHEKAOLVKEKAOXING、LINGHUOXING、ANQUANXING、NENGYUANXIAOLV、CHUTOUZIDENGYINSUJINXINGSHEJI。

　　CANKAOWENXIAN

　　lGAOSHAREXUEGONGSIYOUGUANZILIAO

　　2CAOFANGHAI，ZHENGMINGSHANDENGFENGJIYILVWANGJIQUJISHUYUWUCHENSHIQILIUGUOLVXUNHUANJIENENGTANTAOCRA.2001.No.5

　　3GUOJIABIAOZHUN．《JIEJINGCHANGFANGSHEJIGUIFAN>.GB50073-2001

　　4HUANGYAHUI.WUCHENCHEJIANHUOZAIYANLIUKONGZHIJIQIUJIESHAO．2000.03.30

　　5CHENLINXINDENGBIANZHU.JIEJINGCHANGFANGSHEJIYUSHIGONG．HUAGONGCHUBANSHE，2002

　　6W.WHYTF.CleanroomDesign.SecondEdition.JohnWitey＆SonsLtd.1999